A Novel Radiative Substrate Heater

Authors: ABDULLAH CEYLAN, ERDAL KAYNAK, ŞADAN ÖZCAN, TEZER FIRAT

Abstract: In this work, we have developed a new low cost radiative substrate heater for deposition of high-T_c superconducting thin films. It has all the features required for the preparation of high quality superconducting thin films. It is possible to reach ~ 800 °C substrate temperature with it by using only one 250 W halogen projector bulb.

Keywords: Substrate heater, Magnetron sputtering, YBa_2Cu_3O_{7-\delta} thin film.

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