Temperature measurements in a manufactured RF plasma jet in various Ar/N$_{2}$ mixtures

Authors: MOHAMMAD NASIR ROSTAMI RAVARI, ALIREZA GANJOVI, FARIDEH SHOJAEI, AMIR FALAHAT

Abstract: In this paper, using the optical emission spectroscopy technique, a comparative study is performed on the argon excitation and nitrogen vibrational temperatures in the plasma discharge medium of a manufactured RF plasma jet. The argon contribution in the Ar/N$_{2}$ mixture is varied from 70% to 98% and the obtained optical emission spectra from argon and molecular nitrogen are analyzed. The highest emission intensities of neutral argon (Ar I) are recorded in the wavelength range of 790-850 nm. It is seen that, at the higher argon percentages in the mixture, the emission intensity from all the formed species in the plasma discharge medium of the RF plasma jet will increase. In addition, at the lower Ar contributions in the mixture, both the argon excitation and nitrogen vibrational temperatures are higher. Furthermore, it is shown that, at the higher Ar percentages in the mixture, both of the electronic temperatures are decreased.

Keywords: RF plasma jet, optical emission spectroscopy, Ar/N$_{2}$ mixture

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