A 3-D Hall Sensor for Precise Angular Position Measurements

Authors: KONSTANTIN VESELINOV DIMITROV

Abstract: A 3-D silicon Hall effect sensor for precise angular-position measurement over 360° rotation is presented. This vector microtransducer functionally integrates into a common sensor region two parallel-field Hall devices for in-plane components of the magnetic field and one orthogonal Hall version for the perpendicular for the chip magnetic field. The advantages of this magnetometer are its low channel cross-sensitivities, remarkable simplified device design and high spatial resolution.

Keywords: Magnetometers, Integrated Hall sensors, Angular position, errors estimation.

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